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Home Products Pan-Semiconductor Subsystems Precision Optics Modules

Precision Optics Modules

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Integrated Optical Solutions – Covers optical components, modules, and subsystems for advanced optical systems.

High-Precision Optical Alignment – Enables superior imaging quality and system performance through advanced assembly technologies.

Optimized Performance – Delivers uniform illumination and reliable optical projection solutions for semiconductor, inspection, and other precision applications.

Precision Optics Modules

Key Specifications

Specifications

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Maximum Lens Diameter

Up to 500 mm

Decenter Accuracy

≤ 0.2 arcsec

Air Spacing Accuracy

≤1 μm

Applications

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